| 1/27/2010 6:34:19 PM | Products | 0 comments |
Tegal Receives Silicon DRIE Tool Order From Precision Timing Device Manufacturer
Silicon DRIE System Will Be Used to Develop MEMS-based Timing Devices for Industrial and Consumer Applications
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| 1/16/2009 10:32:50 AM | Products | 0 comments |
Major Power Management Components Maker Purchases Tegal Endeavor AT PVD System Upgrade
Additional Suite of Power Device Manufacturing Processes for Thin Wafer Backside Metallization Enabled by Endeavor AT System Upgrade
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| 11/13/2008 6:23:31 PM | Products | 0 comments |
Tegal Receives Order for Deep Silicon Etch Cluster Tool for Power Management and MEMS Sensor Applications
The Tegal 4200SE cluster tool system is a high-density plasma etch tool featuring an inductively coupled plasma etch reactor and magnetic plasma confinement.
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| 11/12/2008 3:16:53 PM | Products | 0 comments |
Tegal Receives Repeat Order for 901ACS Plasma Etch System from Leading High-Brightness LED Maker
Follow-On Order for 901ACS Production Tool Shows Customer’s High Degree of Satisfaction with Workhorse Tegal 900ACS Series Production Etchers
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| 11/11/2008 11:45:30 PM | Products | 0 comments |
Tegal Ships First Deep Silicon Etch System Following Acquisition of Alcatel Micro Machining System Product Lines
Tegal had shipped a Tegal 200SE ICP deep reactive ion etch (DRIE) system to a leading supplier of substrates and services in the integrated circuit and MEMS sensor markets.
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| 9/18/2008 6:38:02 PM | Industry | 0 comments |
Tegal Completes Agreement to Acquire Alcatel Micro Machining (AMMS) Product Lines and IP for 3D Packaging and MEMS Devices
Tegal Corporation announced that it had completed its previously announced acquisition from Alcatel Micro Machining Systems (AMMS) and Alcatel Lucent, of their Deep Reactive Ion Etch (DRIE) and Plasma Enhanced Chemical Vapor Deposition (PECVD) products, and the related intellectual property.
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| 9/2/2008 11:53:55 PM | Industry | 0 comments |
Tegal Corporation Agrees to Acquire Alcatel Micro Machining (AMMS) Product Lines and IP for 3D Packaging and MEMS Devices
Tegal will continue the development of the AMMS DRIE product line, including the integration of the AMMS process modules on its recently-introduced Compact bridge platform and the completion of a 300mm process chamber.
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| 8/19/2008 3:01:43 PM | Partnership | 0 comments |
Tegal and CIMAC Enter Partnership to Bring Greater Efficiency and Throughput to Semiconductor Processing Equipment
Software Development for Tegal AMS PVD tool and Enhancements to Current Generation Tegal Endeavor AT PVD Cluster Tool Highlight Partnership
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| 7/10/2008 6:44:10 PM | Products | 0 comments |
Tegal Receives 901ACS Plasma Etch System Order and ACS Upgrade Orders From Leading Maker of Commercial BioMEMS-Based Medical Testing Products
ACS Functionality and Sophistication Provide Winning Combination of UI Features and Software Robustness for Medical Device Production
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| 6/15/2008 5:59:32 PM | Products | 0 comments |
Tegal Receives Advanced Etch System Order From SVTC Technologies for Non-Volatile Memory Development
SVTC, which operates the leading process development foundry in the U.S., serves the rapidly growing novel memory and transistor market, along with the MEMS/MOEMS, photovoltaics, biotechnology, image sensors and high-voltage markets.
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| 4/9/2008 9:53:46 PM | Partnership | 0 comments |
Tegal Corporation Announces Compact 360 NLD Beta Site Agreement With Leading High Brightness LED Manufacturer
Nano-Layer Deposition Tool and Processes Will Support Advanced Development for HB-LEDs
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| 3/18/2008 9:59:24 AM | Products | 0 comments |
Tegal Receives 6540 Plasma Etch System Order From the Pennsylvania State University for PZT MEMS and Other Complex Oxide Patterning Applications
New Plasma Etch System Supports Penn State’s National Nanotechnology Infrastructure Network Laboratory Research Work and Industrial Services
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| 1/24/2008 9:55:07 AM | Products | 0 comments |
Tegal Ships 981ACS Plasma Etch System to Top-Ten European Semiconductor Manufacturer for Automotive MEMS Device Production
Mid-range autos expected to go from 40 to 60 MEMS devices per vehicle by 2011
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| 11/7/2007 8:15:44 PM | Partnership | 0 comments |
Tegal Receives Repeat Order for 6500 Series Advanced Plasma Etch System from Skyworks Solutions, Inc
Global Wireless Device Leader Again Selects Tegal Fabrication Tools to Produce High Performance Components For Multimode and Multimedia Handsets
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| 6/19/2007 3:01:27 PM | Products | 0 comments |
Major U.S. Maker of High Performance MEMS Motion Sensors Orders Tegal Endeavor AT PVD Tool
Tool Purchase Aimed at Advanced MEMS Accelerometer Fabrication for Consumer Device Markets
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| 8/26/2006 1:29:34 AM | Products | 0 comments |
Tegal Receives Orders for 900 Series Etchers From Leading Fabs in Japan
Repeat Orders for MEMS and Wireless Device Fabrication
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| 7/30/2006 2:36:10 PM | Products | 0 comments |
Tegal Receives Order for Advanced 6500 Spectra Etch Tool From Crocus Technology, SA
Unique Tegal Technology Selected for Commercializing MRAM Technology
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| 12/20/2005 5:53:58 PM | Products | 0 comments |
Tegal Receives Advanced Etch Tool Order for RRAM Development
Tegal Corporation today announced that a US-based technology company has placed an order for 6540 advanced etch system for the development of RRAM (Resistive Random Access Memory) devices incorporating certain unique new materials.
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| 11/20/2005 6:03:03 PM | Investment | 0 comments |
Newbridge Nanotechnology Index (NNIX) Announces Quarterly Rebalance and Two Constituent Changes to Index
Newbridge Securities Corporation today announced the quarterly rebalancing and reconstitution of its Newbridge Nanotechnology Index (NNIX). Among the index constituents, we have made one addition and one removal, leaving the total number of companies included at 24. The NNIX ended the quarter at 931.47, down 3.5% from the last rebalance on August 18, 2005.
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| 10/13/2005 5:57:10 PM | Products | 0 comments |
Major European Device Manufacturer Orders Additional Advanced Plasma Etch Systems from Tegal
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor and nanotechnology devices.
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| 8/5/2005 5:09:38 PM | Products | 0 comments |
Tegal Receives Repeat Order for 900ACS Series Etch Tool from Leading Japanese Automotive Electronics Firm
The 901ACS system is designed around a production-proven wafer transport design that can accommodate 75 mm to 150 mm round silicon, GaAs, InP, and dielectric material substrates.
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| 12/17/2004 9:50:51 AM | MEMS, Products | 0 comments |
Tegal Receives Orders from MEMS Device Manufacturers in Europe and Taiwan
Many of today's MEMS and nano-structure devices require simple, high-throughput plasma processes uniquely served by the Tegal's 900 and 980 series plasma etch systems.
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| 12/15/2004 5:03:17 PM | Patent | 0 comments |
Tegal Awarded Key Patent for New Magnetron Sputter Source
New Sputter Source Represents Break Through in Target Efficiency -- Provides Significant Cost Savings to Chip Manufacturers
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| 7/22/2004 5:53:47 PM | Patent | 0 comments |
Tegal Awarded Two Key Patents for Nano Layer Deposition
Unique Thin Film Deposition Technology Surpasses Atomic Layer Deposition in Flexibility and Throughput
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| 4/13/2004 8:51:49 AM | Electronics | 0 comments |
Tegal Corporation Announces High-K Nano Layer Deposition Joint Development Project With Sharp Corporation's American Laboratories
The JDP builds on Tegal's patented Nano Layer Deposition (NLD) technology for depositing ultra thin layers of new dielectric materials for semiconductor and nanotechnology device production
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| 12/16/2003 11:46:57 AM | Products | 0 comments |
Tegal Receives Repeat 980 Series Order from World's Leading Microfluidic MEMS Device Maker
"...has positioned Tegal well for the MEMS and nanotechnology market growth our community anticipates."
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