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12/23/2010 3:16:20 PM
A*STAR Institute of Microelectronics and Globalfoundries Collaborate to Develop MEMS Capacitive Sensor Platform Technology for Motion Sensing Applications

The Institute of Microelectronics (IME), a research institute of the Agency for Science, Technology and Research (A*STAR), and GLOBALFOUNDRIES are joining hands to develop MEMS[1] Capacitive Sensor Platform Technology for power-efficient and highly sensitive motion sensing applications that are relevant to consumer electronics, automotive and aerospace industries. MEMS capacitive sensor technology is increasingly common in today’s consumer electronics, playing a key role in the way users interact with mobile communication devices and 3D virtual multimedia gaming systems.

Under the agreement, GLOBALFOUNDRIES will be responsible for preliminary platform design specifications and process flow. IME will concentrate its effort in developing a modular and scalable capacitive sensor technology platform with standardised process modules and process integration scheme based on IME’s advanced MEMS fabrication facilities and tools. IME’s multi-wafers bonding technology will be a key enabler for this joint project.

“GLOBALFOUNDRIES is a founding member of the A*STAR MEMS Consortium and we are glad to extend our collaboration with IME to support Singapore’s vision of a world-class MEMS hub for R&D and manufacturing,” said Mr Raj Kumar, Senior Vice President of the 200mm Business Unit and General Manager of GLOBALFOUNDRIES Singapore. “By partnering with IME, GLOBALFOUNDRIES is able to leverage on IME’s 16 years of expertise in MEMS technology development. The joint development of platform technology and design enablement will greatly help GLOBALFOUNDRIES enhance its MEMS foundry offering to its customers.”

Said Professor Dim-Lee Kwong, Executive Director of IME, “The worldwide MEMS industry is entering an exciting chapter in their development and growth, with revenues projected to hit more than USD 16 billion (SGD 22 billion) in 2015[2]. IME is committed to helping our industry partners respond faster to upcoming trends by anticipating their needs and providing them with solutions that are relevant, practical and sustainable.”

The Institute of Microelectronics (IME)

The Institute of Microelectronics (IME) is a research institute of the Science and Engineering Research Council of the Agency for Science, Technology and Research (A*STAR). Positioned to bridge the R&D between academia and industry, IME's mission is to add value to Singapore's semiconductor industry by developing strategic competencies, innovative technologies and intellectual property; enabling enterprises to be technologically competitive; and cultivating a technology talent pool to inject new knowledge to the industry. Its key research areas are in integrated circuits design, advanced packaging, bioelectronics and medical devices, MEMS, nanoelectronics, and photonics. For more information, visit IME on the Internet:

The Agency for Science, Technology and Research (A*STAR)

The Agency for Science, Technology and Research (A*STAR) is the lead agency for fostering world-class scientific research and talent for a vibrant knowledge-based and innovation-driven Singapore. A*STAR oversees 14 biomedical sciences, and physical sciences and engineering research institutes, and seven consortia & centre, which are located in Biopolis and Fusionopolis, as well as their immediate vicinity. A*STAR supports Singapore's key economic clusters by providing intellectual, human and industrial capital to its partners in industry. It also supports extramural research in the universities, hospitals, research centres, and with other local and international partners.

For more information about A*STAR, please visit


GLOBALFOUNDRIES is the world’s first full-service semiconductor foundry with a truly global manufacturing and technology footprint. Launched in March 2009 through a partnership between AMD [NYSE: AMD] and the Advanced Technology Investment Company (ATIC), GLOBALFOUNDRIES provides a unique combination of advanced technology, manufacturing excellence and global operations. With the integration of Chartered in January 2010, GLOBALFOUNDRIES significantly expanded its capacity and ability to provide best-in-class foundry services from mainstream to the leading edge. GLOBALFOUNDRIES is headquartered in Silicon Valley with manufacturing operations in Singapore, Germany, and a new leading-edge fab under construction in Saratoga County, New York. These sites are supported by a global network of R&D, design enablement, and customer support in Singapore, China, Taiwan, Japan, the United States, Germany, and the United Kingdom. For more information on GLOBALFOUNDRIES, visit

Other Headlines from A*STAR Research ...
 - NUS and A*STAR Launch Research Programmes in New Growth Area of Green Electronics
 - Materials chemistry: Let it snow
 - Nanomedicine: Loading up a cure
 - Graphene: Go with the flow
 - Quantum physics: A degree of entanglement

Other Headlines from GLOBALFOUNDRIES ...
 - GLOBALFOUNDRIES enters a broad strategic partnership with imec
 - A*STAR Institute of Microelectronics and Globalfoundries Collaborate to Develop MEMS Capacitive Sensor Platform Technology for Motion Sensing Applications
 - GLOBALFOUNDRIES Partners With SVTC to Accelerate High-Volume MEMS Manufacturing

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