Tegal Corporation today announced two orders for its 900 series plasma etch systems from MEMS device manufacturers in Europe and Taiwan. The European order came from a leading supplier of MEMS devices to the automotive industry, and is a follow-on order to add capacity in high-volume MEMS fabrication. The Taiwan order came from a start-up MEMS device foundry.
"Tegal produces a wide range of reliable etch tools ideal for low cost production of MEMS sensor and other nanotechnology devices used across the global automotive, computer and biotechnology industries," said Mike Parodi, Tegal's chairman, president and CEO. "The 900 series provides an ideal platform for reliable and cost effective etch processing."
Popular applications for the Tegal 900 series plasma etch systems include silicon nitride and oxide dielectric etch in addition to a wide variety of polymer etch treatments. Many of today's MEMS and nano-structure devices require simple, high-throughput plasma processes uniquely served by the 900 and 980 series plasma etch systems.