Nanometrics may have a lot on its corporate mind these days, but there is nothing like a patent dispute to distract from a complicated merger.
Israeli metrology supplier Nova Measuring Instruments Ltd. said today that it had filed a suit against Milpitas, Calif.-based Nanometrics Inc., alleging patent infringement. Nova filed a complaint in the U.S. District Court for the Northern District of California claiming that Nanometrics infringed Nova's U.S. Patent No. 6,752,689, which was granted June 22, 2004, with a priority date in 1995. The patent relates to Nova's integrated metrology IM tools.