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3/10/2005 5:32:53 PM
Nova Sues Nano Alleging Infringement

Nanometrics may have a lot on its corporate mind these days, but there is nothing like a patent dispute to distract from a complicated merger.

Israeli metrology supplier Nova Measuring Instruments Ltd. said today that it had filed a suit against Milpitas, Calif.-based Nanometrics Inc., alleging patent infringement. Nova filed a complaint in the U.S. District Court for the Northern District of California claiming that Nanometrics infringed Nova's U.S. Patent No. 6,752,689, which was granted June 22, 2004, with a priority date in 1995. The patent relates to Nova's integrated metrology IM tools.

...more at Electronic News

Other Headlines from Nanometrics ...
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 - Nanometrics Announces Launch of its Mosaic II Overlay Metrology System and Selection by Leading Asian Customer
 - Nanometrics Announces Order for Complete CD Metrology Solution from Leading Japanese Semiconductor Company
 - Nanometrics Reports First Quarter Financial Results
 - Nanometrics Announces Follow-On Shipments and Qualification of UniFire for High Volume Production

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 - Asylum Research Settles Patent Dispute with Veeco


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