At the M&M show 2009, Carl Zeiss is introducing a highly flexible NanoPatterning Engine for its CrossBeam (FIB/SEM) workstations. Being able to flexibly and precisely control the focused ion beam – possibly in combination with process gases – is key in scientific and industrial research and development. For productivity applications, reliability and ease of use are major factors that determine the quality of the beam control interface. The new NanoPatterning Engine Software addresses these requirements by providing a highly flexible yet intuitive user interface enabling the most complex and high-accuracy structuring at 16 bit accuracy.
Key features of the NanoPatterning Engine include:
- a “drawing program” style interface for the creation of complex shapes, e.g. ellipses, rings, text etc.,
- vector-based patterning of shapes,
- 3D patterning based on gray scale bitmaps,
- real-time visualization from the perspective of the patterning beam, as well as
- live SEM imaging of the patterning process.
For higher demands a software extension is available that provides additional functionality such as patterning of voids and outlines, threshold milling and many more. Application examples comprise atom probe tip preparation, microstrainer, nano-optical elements such as Fresnel-lenses and countless customer specific structures and applications.
Carl Zeiss SMT utilizes its globally leading know-how in light, electron and ion-optical technologies to offer its customers in industry and R&D a broad portfolio of products, services and application solutions. The market-leading systems and solutions from Carl Zeiss SMT are used in mutually strengthening fields of application in nanotechnology such as semiconductor technology, materials research and the life sciences. The global customer community is constantly growing. As the innovation leader for lithography optics, as well as optical and particle-beam based inspection, analysis and measuring systems, Carl Zeiss SMT opens up new avenues for its customers in industrial manufacturing environments, quality assurance and industrial and university R&D. Together with its subsidiaries in Germany, England, France, the USA, Israel and Singapore, the international group of companies has over 2,500 employees. In fiscal year 2007/08, the wholly owned subsidiary of Carl Zeiss AG generated revenues of over EUR 1,000 million.
Further information: http://www.smt.zeiss.com
